Introduction to Total- and Partial-pressure Measurements in Vacuum Systems

accelerated Anode atomic Bourdon tube calibration gas capacitance manometer capillary cathode charged particle coils collision deadweight tester degassing detected detector diaphragm dynode electron multiplier emission current energy equation Faraday cup Filament Grid frequency gases gauge constant gauge pumping H₂O height hot-filament Instrum instrument ion current ion gauge ion source ionization gauge ionization source lon collector low-pressure magnetic field magnetron manometer mass filter mass number mass separator mass spec Mass-to-charge ratio McLeod gauge mercury molecular molecules nude number density omegatron operating orifice outgassing output parameters partial pressures Phys Pirani gauges positive ions potential pres pressure measurement Redhead Reprinted with permission residual current resolution resonant Review Sci rods schematic secondary emission sensitivity shown in figure spectrum Suppressor grid technique temperature thermal-conductivity gauges Thermocouple torr total pressure triode trometer U-tube manometer Ultrahigh ultrahigh-vacuum unit V₁ Vacuum Gauge vacuum system valve velocity voltage volume wire X-ray limit