Infrared Characterization for MicroelectronicsWorld Scientific, 1999 - 160 pages Most of the books on infrared characterization are for applications in chemistry and no book has been dedicated to infrared characterization for microelectronics. The focus of the book will be on practical applications useful to the production line and to the research and development of microelectronics. The background knowledge and significance of doing a particular type of infrared measurement will be discussed in detail. The principal purpose of the book is to serve as a useful handbook for practising engineers and scientists in the field of microelectronics. |
Table des matières
Preface | 1 |
REFERENCES | 13 |
REFERENCES | 23 |
THE MEASUREMENT OF EPITAXIAL LAYER | 45 |
REFERENCES | 53 |
REFERENCES | 80 |
THE CHARACTERIZATION OF PSG BPSG SOG | 87 |
REFERENCES | 102 |
REFERENCES | 122 |
Appendix A | 155 |
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Expressions et termes fréquents
a-SiC:H films absorbance absorption coefficient American Institute amorphous silicon Appl application of infrared atoms boron nitride BPSG BPSG films C-O complex calibration chemical vapor deposition cm¹ concentration detected devices discussed ECR PECVD Electrochem Electron epitaxial epitaxial layer frequency FTIR spectra gallium arsenide Ge-H H₂O heavily doped hydrogen hydrogen content IEEE impurities infrared absorption peaks infrared absorption spectroscopy infrared spectroscopy infrared spectrum Institute of Physics integrated circuits Lett low temperature Materials measurement method microelectronics moisture molecules MOSFET N₂ nitrogen oxygen oxygen precipitation p-type PECVD silicon nitride phonon Phys plasma polyimide refractive index Reprinted with permission sample semi-insulating GaAs wafers semiconductor shown in Fig Si-H bonds Si-N Si-O Si-OH silane silicon dioxide silicon dioxide films silicon nitride films silicon wafers SiO2 films SOG films Solid sp² bonded spectrometer substrate surface symmetric stretch Technol thickness vibration modes Vibrational Spectroscopy wavelength Wavenumber Wavenumber cm-1
Références à ce livre
CVD XV: Proceedings of the Fifteenth International Symposium on Chemical ... Mark Donald Allendorf,Michael L. Hitchman Affichage du livre entier - 2000 |