Infrared Characterization for Microelectronics

Couverture
World Scientific, 1999 - 160 pages
Most of the books on infrared characterization are for applications in chemistry and no book has been dedicated to infrared characterization for microelectronics. The focus of the book will be on practical applications useful to the production line and to the research and development of microelectronics. The background knowledge and significance of doing a particular type of infrared measurement will be discussed in detail. The principal purpose of the book is to serve as a useful handbook for practising engineers and scientists in the field of microelectronics.
 

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Table des matières

Preface
1
REFERENCES
13
REFERENCES
23
THE MEASUREMENT OF OXYGEN AND
25
THE MEASUREMENT OF EPITAXIAL LAYER
45
REFERENCES
53
REFERENCES
82
Stabilization of PSG and BPSG by annealing
94
THE CHARACTERIZATION OF AMORPHOUS
105
REFERENCES
122
Appendix A
155
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